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仪器网/ 行业应用/ 解决方案/ 相位分辨光学发射光谱学：一种用于研究电容射频放电中电

相位分辨光学发射光谱学：一种用于研究电容射频放电中电

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Various types of capacitively coupled radio frequency (CCRF) discharges are frequently used
for different applications ranging from chip and solar cell manufacturing to the creation of
biocompatible surfaces. In many of these discharges electron heating and electron dynamics
are not fully understood. A powerful diagnostic to study electron dynamics in CCRF
discharges is phase resolved optical emission spectroscopy (PROES). It is non-intrusive and
provides access to the dynamics of highly energetic electrons, which sustain the discharge via
ionization, with high spatial and temporal resolution within the RF period. Based on a time
dependent model of the excitation dynamics of specifically chosen rare gas levels PROES
provides access to plasma parameters such as the electron temperature, electron density and
electron energy distribution function (EEDF). In this work the method of PROES is reviewed
and some examples of its application are discussed. First, the generation of highly energetic
electron beams by the expanding sheath in geometrically symmetric as well as asymmetric
discharges and their effect on the EEDF are investigated. Second, the physical nature of the
frequency coup领 in dual frequency discharges operated at substantially different frequencies
is discussed. Third, the generation of electric field reversals during sheath collapse in single
and dual frequency discharges is analysed. Then excitation dynamics in an electrically
asymmetric novel type of dual frequency discharge is studied. Finally, limitations of PROES
are discussed. 超快门宽增强型CCD相机
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