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纳米压印机
- 品牌：丹麦NIL TECHNOLOGY
- 型号： NIL
- 产地：丹麦
- 供应商报价： 面议
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香港电子器材有限公司
更新时间：2024-04-17 09:20:52 -
企业性质授权代理商
入驻年限第7年
营业执照已审核
- 同类产品光刻/涂布(13件)
联系方式：刘小姐021-63813293
联系我们时请说明在仪器网（www.yiqi.com）上看到的!
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- 详细介绍
NILZL产品
小型纳米压印机
产品简介:
Process is controlled by a programmable PLC with touch screen user interface.
User can customize process parameters.
Wafer and Mold are held by vacuum chuck
UV curable imprint polymer compatible with traditional photolithography process工艺参数
Wafer size 4 in
Imprintable wafer area 2 in
Imprint pressure 0 - 25 PSI (upgradable to 100 PSI imprint pressure)
Mold substrate size 5 x 0.090 in
Typical imprint throughput < 5 minutes/wafer设备尺寸及环境要求
Controller Platform
Dimension 5.8 x 16.5 x 12 in 17 x 16 x 15 in
Weight 18.5 LB 45 LB
Environment 10 - 35 C, 65% 10 - 35 C, 65%Facility requirements
Filtered Pressure source 70 - 100 PSI
Vacuum source <-14 PSI
Power 110-220V, 2A, 50/60 Hz
Clean-room class 1000 or better
