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仪器/ 产品中心/ 光学仪器/ 光学元件/ 位移台/ MCL 纳米线性位移台P系列
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MCL 纳米线性位移台P系列

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详细介绍


Features
  • Compact tubular design

  • True flexure guided motion

  • Position sensors, closed loop control

  • Up to 70 μm motion

  • Invar and titanium construction

  • Closed loop control



Typical Applications
  • Single axis positioning

  • Surface analysis

  • Metrology




Product Description

The Nano-P Series are piezo actuated, closed loop, linear translators that incorporate a unique flexure hinge design. The flexure hinge is machined entirely from a single block of high strength titanium using an advanced electrical discharge machining process. This hinge, available for the first time on a tubular nanopositioner, ensures the highest degree of repeatability and load capability. Unlike similar looking products on the market, the Nano-P Series does not have internal Belleville springs. Belleville springs are not frictionless and therefore cannot provide the high degree of repeatability of a true nanopositioner. The guiding mechanism of the Nano-P Series is a true flexure spring - eliminating mechanical friction and stiction. The Nano-P Series is constructed from invar and titanium for the best combination of thermal stability and mechanical strength, making it ideal for the most demanding positioning and metrology applications. The Nano-P Series is available in three standard ranges of motion with integrated position sensors utilizing proprietary PicoQ? technology to provide absolute, repeatable position measurement with picometer accuracy under closed loop control. Custom systems available.



Noise Plots - Nano-P15





Test Data - Nano-P35



The Nano-P35 closed-loop response to a 3nm peak-to-peak square wave input signal, measured with USB digital interface. Notice the ultra-low, sub-nanometerstability of the system over the time scale. Similar products offered by other companies are unable to achievesuchlow-noise results. The Nano-Puses a true flexure guiding mechanism and low-noise sensors to achieve high-resolutionpositioning.



Technical Specifications

Range of motion (Nano-P15)15 μm
Range of motion (Nano-P35)
35 μm
Range of motion (Nano-P70)70 μm
Resolution (15/35/70 μm)0.03/0.07/0.14 nm
Resonant Frequency2.5 kHz ±20%
Recommended max. load*0.2 kg
Body MaterialInvar and Titanium
ControllerNano-Drive?
* Larger load requirements 首ld be discussed with our engineering staff.



Additional Information

Nano-P Series Drawing

Nano-P Series Catalog Pages



Related Products

  • Nano-Mini

  • Nano-OP Series

  • Nano-Z Series

  • Nano-MZ

  • Nano-F Series

  • Accessories

  • Nano-Drive?


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