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仪器/ 产品中心/ 光学仪器/ 光学元件/ 位移台/ MCL纳米双轴、三轴位移台MET系列
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MCL纳米双轴、三轴位移台MET系列

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详细介绍


Features
  • High speed, multi-axis

  • 2 and 3 axis configurations

  • Closed loop control

  • Ultra-low noise performance

  • Picometer positioning resolution

  • High stability

Typical Applications
  • High speed, high resolution positioning

  • Metrology

  • AFM

  • SPM




Product Description

The Nano-MET2 and Nano-MET3 are ultra-low noise, high precision nanopositioning systems with picometer positioning resolution. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement under closed loop control. The ultra-low position noise (4 picometers/Hz in XY and 400 femtometers/√Hz in Z) of these nanopositioning systems make them ideal for demanding metrology applications. With a resonant frequency of 13.5kHz, the z-axis of the Nano-MET3 offers ultra-fast response needed for demanding AFM applications. Related products include theNano-METZ,Nano-MET10 and Nano-MET20nanopositioning systems.



Technical Specifications

Range of motion (XY)75 μm
Range of motion (Z)
5 μm
Resolution (XY)0.15 nm
Resolution (Z)0.005 nm
Resonant Frequency (XY, Nano-MET2)1.4 kHz
Resonant Frequency (XY, Nano-MET3))1.0 kHz
Resonant Frequency (Z, Nano-MET3)13.5 kHz
Recommended max. load (horizontal)*100 g
Recommended max. load (vertical)*100g
Body MaterialAluminum
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Position Noise Spectrum

The Nano-MET Series demonstrates less than4 picometersof position noise on X and Y and less than400 femtometersof position noise on Z. Click below to enlarge and view the data for each axis.


X-Axis


Y-Axis


Z-Axis



Additional Information

Nano-MET2 Drawing (2 Axis)


Nano-MET3 Drawing (3 Axis)

Nano-MET Series Catalog Pages



Related Products

  • Nano-LPQ

  • Nano-PDQ Series

  • Nano-METZ

  • Nano-MET10 and Nano-MET20

  • Accessories

  • Nano-Drive


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