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仪器/ 产品中心/ 光学仪器/ 光学元件/ 位移台/ MCL 提示 /倾斜、旋转纳米位移台Theta
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MCL 提示 /倾斜、旋转纳米位移台Theta

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详细介绍


Features
  • Precision rotation: 2 mradians range

  • Accessible and well defined axis of rotation

  • Mount in any orientation

  • High resolution: 4 nanoradians

  • Closed loop control



Typical Applications
  • Laser beam scanning

  • Lithography

  • FBG writing

  • Interferometry




Product Description

The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing, and laser beam tracking or scanning. The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control.



Technical Specifications

Range of motion2.0 mradians
Resolution
4 nradians
Resonant Frequency (unloaded).2 kHz ±20%
Body MaterialAl or Invar
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Additional Information

Nano-Theta Drawing

Nano-Theta Catalog Pages



Related Products

  • Nano-Theta/H

  • Nano-MTA Series

  • Accessories

  • Nano-Drive


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