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MCL 提示 /倾斜、旋转纳米位移台Theta
- 品牌:美国MCL Think Nano
- 型号: Nano-Theta
- 产地:美国
- 供应商报价: 面议
- 北京欧兰科技发展有限公司 更新时间:2022-03-04 17:31:39
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企业性质
入驻年限第4年
营业执照
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- 详细介绍
Features Precision rotation: 2 mradians range
Accessible and well defined axis of rotation
Mount in any orientation
High resolution: 4 nanoradians
Closed loop control
Typical Applications Laser beam scanning
Lithography
FBG writing
Interferometry
Product Description
The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing, and laser beam tracking or scanning. The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control. Technical Specifications
Range of motion 2.0 mradians Resolution 4 nradians Resonant Frequency (unloaded). 2 kHz ±20% Body Material Al or Invar Controller Nano-Drive * Larger load requirements 首ld be discussed with our engineering staff. Additional Information
Nano-Theta Drawing Nano-Theta Catalog Pages Related Products
Nano-Theta/H
Nano-MTA Series
Accessories
Nano-Drive