关于此项工作的更多详细信息首次发表于 Optics Express 16129,2012 年 7 月 2 日,第 20 卷,
Ellipsometry is a very versatile optical technique tha
Spectroscopic ellipsometry is a powerful technique to
The feasibility of using the MM-16 SE in measuring thi
Spectroscopic Ellipsometry based on the liquid crystal
Liquid Crystal Modulation Spectroscopic Ellipsometry i
The high accuracy characterisation of the thicknesses
Optical characterization techniques proved to be compl
When compared with other optical metrology instruments