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德国SUSS LabSpin6/ LabSpin8 匀胶机
- 品牌：德国suss
- 型号： LabSpin6/ LabSpin8
- 产地：德国
- 供应商报价： 面议
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香港壘為信息科技實業有限公司
更新时间：2020-10-26 11:04:52 -
企业性质一般经销商
入驻年限第5年
营业执照已审核
- 同类产品光刻机(6件)
联系方式：张先生
联系我们时请说明在仪器网（www.yiqi.com）上看到的!
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- 详细介绍
Substrates
§ LabSpin 6: up to 150mm round or 100mm square substrates§ LabSpin 8: up to 200mm round or 150mm square substrates
Motor
§ Brushless E-motor with collection glass beaker§ Spin speed: min 50 rpm
max 8000 rpm (with 200mm chuck)
§ Acceleration: max 3000 rpm/s
Controller
§ Graphical User Interface: Touch panel with color display§ Number programmable recipes: max 200
§ Step number per recipe: max 40
§ Loop function: repeats a set of process stepCoater Options
§ Cover plate for additional functions
§ Resist dispense systems
É Pressurized syringe dispense
É Full automatic dispense system
§ Edge Bead Removal (EBR)
Developer Options
§ Cover plate for additional functions§ Developer dispense option
§ DI-water dispense option
§ Nitrogen Drying option
