Insulator analysis using combined FIB-SEM instrument with TOF-SIMS

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The development of a Time of Flight Secondary Ion Mass Spectrometer (TOF-SIMS) that can be
attached to a FIB-SEM instrument provides an analyzer that very well complements the standard EDS detector. However, contrary to EDS, it gives much better depth resolution, possibility of depth profiling as well as distinguishing isotopes.
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