Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.
ET4000A: Multifunctional and automatic
ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
ET4000M: Reasonable, high performance and general-use
技术参数：
Max. sample size 210 × 210 mm to 300 × 400 mm
Repeatability 1 σ within 0.5 nm
Measuring range Z: 100 μm X: 100 mm (Y stroke: 150 to 400 mm)
Resolution Z: 0.1 nm X: 0.01 μm
Measuring force 0.5 μN to 500 μN
主要特点：
Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.
ET4000A: Multifunctional and automatic
ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
ET4000M: Reasonable, high performance and general-use
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仪企号
上海恒一精密仪器有限公司
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