Substrates
LabSpin 6: up to 150mm round or 100mm square substrates
LabSpin 8: up to 200mm round or 150mm square substrates
Motor
Brushless E-motor with collection glass beaker
Spin speed: min 50 rpm
max 8000 rpm (with 200mm chuck)
Acceleration: max 3000 rpm/s
Controller
Graphical User Interface: Touch panel with color display
Number programmable recipes: max 200
Step number per recipe: max 40
Loop function: repeats a set of process step
Coater Options
Cover plate for additional functions
Resist dispense systems
Pressurized syringe dispense
Full automatic dispense system
Edge Bead Removal (EBR)
Developer Options
Cover plate for additional functions
Developer dispense option
DI-water dispense option
Nitrogen Drying option