| 仪器分类: | AFM | 空间分辨率: | 0.02nm |
| 样品尺寸: | 150mm*150mm | 样品台移动范围: | 150mm*150mm |
Park XE15 Specifications
Guided high-force flexure scanner
Scan range : 12 µm (optional 25 µm)
Height noise level: 50 pm
(RMS, at 0.5 kHz bandwidth)
Single module flexure XY-scanner with closed-loop control
Scan range : 100 µm × 100 µm
Z stage range : 25 mm (Motorized)
Focus travel range : 20 mm (Motorized)
Optional precision encoders for repeatable XY positioning
XY stage travel range : 150 mm x 150 mm (Motorized)
Sample size : Open space up to 150 mm x 150 mm, thickness up to 20 mm (optional 200 mm)
Sample weight : < 500 g
10x (0.28 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 M pixel, 5 M pixel (optional)
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)
AFM data analysis software (running on Windows, MacOS X, and Linux)
High performance DSP : 600 MHz with 4800 MIPS
Maximum 16 data images
Maximum data size : 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional)
CE Compliant
Power : 120 W
Signal Access Module (Optional)
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仪企号
上海明古嘉电子科技有限公司
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