使用椭圆偏振光谱仪测量玻璃和预蒸镀基底上Y2O3的折射.p

Ellipsometry is a very versatile optical technique tha

Spectroscopic ellipsometry is a powerful technique to

The feasibility of using the MM-16 SE in measuring thi

Spectroscopic Ellipsometry based on the liquid crystal

Liquid Crystal Modulation Spectroscopic Ellipsometry i

The high accuracy characterisation of the thicknesses

Optical characterization techniques proved to be compl

When compared with other optical metrology instruments

Spectroscopic ellipsometry is a powerful technique for