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仪器/ 产品中心/ 行业专用仪器/ 其它/ 其它行业专用仪器/ MCL 提示 /倾斜、旋转纳米位移台Theta
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MCL 提示 /倾斜、旋转纳米位移台Theta

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详细介绍

Features
  • Precision rotation: 2 mradians range

  • Accessible and well defined axis of rotation

  • Mount in any orientation

  • High resolution: 4 nanoradians

  • Closed loop control



Typical Applications
  • Laser beam scanning

  • Lithography

  • FBG writing

  • Interferometry


Product Description

The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing, and laser beam tracking or scanning. The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control.


Technical Specifications

Range of motion2.0 mradians
Resolution
4 nradians
Resonant Frequency (unloaded).2 kHz ±20%
Body MaterialAl or Invar
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Related Products

  • Nano-Theta/H

  • Nano-MTA Series

  • Accessories

  • Nano-Drive®


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