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MCL 提示 /倾斜、旋转纳米位移台Theta
- 品牌:美国MCL Think Nano
- 型号: Nano-Theta
- 产地:美国
- 供应商报价: 面议
- 北京欧兰科技发展有限公司 更新时间:2022-03-04 17:31:39
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企业性质
入驻年限第4年
营业执照
- 同类产品微定位位移台(82件)
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- 详细介绍
Features Precision rotation: 2 mradians range
Accessible and well defined axis of rotation
Mount in any orientation
High resolution: 4 nanoradians
Closed loop control
Typical Applications Laser beam scanning
Lithography
FBG writing
Interferometry
Product Description
The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing, and laser beam tracking or scanning. The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control.
Technical Specifications
Range of motion 2.0 mradians Resolution 4 nradians Resonant Frequency (unloaded). 2 kHz ±20% Body Material Al or Invar Controller Nano-Drive® * Larger load requirements should be discussed with our engineering staff. Related Products
Nano-Theta/H
Nano-MTA Series
Accessories
Nano-Drive®