「MCL 纳米线性位移台P系列」价格、参数、图片

为你推荐

产品详情：

Features

Compact tubular design
True flexure guided motion
Position sensors, closed loop control
Up to 70 μm motion
Invar and titanium construction
Closed loop control

Typical Applications

Single axis positioning
Surface analysis
Metrology

Product Description

The Nano-P Series are piezo actuated, closed loop, linear translators that incorporate a unique flexure hinge design. The flexure hinge is machined entirely from a single block of high strength titanium using an advanced electrical discharge machining process. This hinge, available for the first time on a tubular nanopositioner, ensures the highest degree of repeatability and load capability. Unlike similar looking products on the market, the Nano-P Series does not have internal Belleville springs. Belleville springs are not frictionless and therefore cannot provide the high degree of repeatability of a true nanopositioner. The guiding mechanism of the Nano-P Series is a true flexure spring - eliminating mechanical friction and stiction. The Nano-P Series is constructed from invar and titanium for the best combination of thermal stability and mechanical strength, making it ideal for the most demanding positioning and metrology applications. The Nano-P Series is available in three standard ranges of motion with integrated position sensors utilizing proprietary PicoQ? technology to provide absolute, repeatable position measurement with picometer accuracy under closed loop control. Custom systems available.

Noise Plots - Nano-P15

Test Data - Nano-P35

The Nano-P35 closed-loop response to a 3nm peak-to-peak square wave input signal, measured with USB digital interface. Notice the ultra-low, sub-nanometer stability of the system over the time scale. Similar products offered by other companies are unable to achieve such low-noise results. The Nano-P uses a true flexure guiding mechanism and low-noise sensors to achieve high-resolution positioning.

Technical Specifications
Range of motion (Nano-P15)	15 μm
Range of motion (Nano-P35)	35 μm
Range of motion (Nano-P70)	70 μm
Resolution (15/35/70 μm)	0.03/0.07/0.14 nm
Resonant Frequency	2.5 kHz ±20%
Recommended max. load*	0.2 kg
Body Material	Invar and Titanium
Controller	Nano-Drive?
* Larger load requirements should be discussed with our engineering staff.