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Features
 | Typical Applications
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Product Description |
The Nano-Mini is one of the smallest flexure guided nanopositioning stages available. Designed for optimum performance on a small footprint, this stage uses an innovative mini-cross section multilayer piezo ceramic which allows for a stiff stage to translate 10 microns with picometer precision. This unique design makes it ideal for applications in precision metrology and microscopy. Internal position sensors utilizing proprietary PicoQ technologyprovide absolute, repeatable position measurement with picometer accuracy under closed loop control. Available in titanium or invar. |
Technical Specifications | |
| Range of motion | 10 μm |
| Resolution | 0.02 nm |
| Resonant Frequency | 1.5 kHz ±20% |
| Resonant Frequency (50g load) | 650 Hz ±20% |
| Stiffness | 1.0 N/μm ±20% |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤2 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.15 kg |
| Body Material | Titanium or Invar |
| Controller | Nano-Drive |
| * Larger load requirements 首ld be discussed with our engineering staff. | |
Additional Information | |
Nano-Mini Drawing | Nano-Mini Catalog Pages |
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上传人：北京欧兰科技发展有限公司
大小：0 B
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