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LLG 极紫外/远紫外波前传感器
- 品牌：德国LLG
- 型号： LLG-EUV/XUV-S
- 产地：德国
- 供应商报价： 面议
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北京欧兰科技发展有限公司
更新时间：2022-03-04 17:31:39 -
企业性质
入驻年限第4年
营业执照
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- 详细介绍
features:
? Hartmann wavefront sensor for coherent and incoherent radiation
?Compact and self-supporting
?Achromatic
?Actinic characterization of: EUVL plasma sources
Free Electron Lasers
HHG beams
?Real-time optics adjustment
?Single-pulse repeatability λ/116 (wrms) for EUV (λ =13.5 nm)Specifications:
?Wavelength range< 1 nm... 60 nm (quantumconverter)
?Field of view 9.0mm x 6.7 mm(larger on request)
?Dynamic range14 bit
?Hartmann plate precision pinholes ?75μm, 250μm pitch
?Tilt range±10°
?x/y translation range±10mm
?UHV compatiblemounted on CF63 flange- 技术资料
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