LLG 极紫外/远紫外波前传感器

features:

? Hartmann wavefront sensor for coherent and incoherent radiation
?Compact and self-supporting
?Achromatic
?Actinic characterization of: EUVL plasma sources
Free Electron Lasers
HHG beams
?Real-time optics adjustment
?Single-pulse repeatability λ/116 (wrms) for EUV (λ =13.5 nm)

Specifications:

?Wavelength range< 1 nm... 60 nm (quantumconverter)
?Field of view 9.0mm x 6.7 mm(larger on request)
?Dynamic range14 bit
?Hartmann plate precision pinholes ?75μm, 250μm pitch
?Tilt range±10°
?x/y translation range±10mm
?UHV compatiblemounted on CF63 flange