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Features
 | Typical Applications
|
Product Description |
The Nano-HSZ is a high speed single axis (Z-axis) precision nanopositioning system. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-HSZ offers a compact footprint, ultra low noise characteristics, and a resonant frequency greater than 7 kHz. These characteristics make it ideal for applications that require noise floors less than 10 picometers and/or high speed performance. With the step response time of the Nano-HSZ set to less than 1 millisecond for extremely high speed applications, scan frequencies up to 500Hz can be achieved. |
Nano-HSZ Position Noise Spectrum  |
Technical Specifications | |
| Range of motion (Z) | 10 μm |
| Resolution | 0.01 nm |
| Resonant Frequency | 7.5 kHz ±20% |
| Scanning Speed (full amplitude) | up to 500 Hz |
| Stiffness | 12 N/μm |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Al, Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-HSZ Drawing | Nano-HSZ Catalog Pages |
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