MCL提示/倾斜、旋转纳米位移台M3Z

Features Compact design Three axis motion (Z θX θY) Low profile: 0.8" Center aperture: 0.25” diameter Closed loop control

Typical Applications Z-axis plus tip/tilt alignment Nanolithography Metrology Nano-alignment

Product Description

The Nano-M3Z is a compact, three axis (Z, θX , θY) nanopositioning system with a 0.25” center aperture. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The center aperture provides an optical path for laser interferometry or tracking. Nano-M3Z’s can be constructed from aluminum or from invar to reduce themal expansion effects. A related model, the Nano-Man5, adds linear X and Y motion to the the Z-axis capabilities of the Nano-M3Z.

Technical Specifications

Additional Information
Nano-M3Z Drawing	Nano-M3Z Catalog Pages

Related Products

• Nano-M250

• Nano-M350

• Nano-Man5

• Nano-MZ

• Nano-Align3 Series

• Accessories

• Nano-Drive®