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Features
 | Typical Applications
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Product Description |
The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a 0.25” diameter center aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion. |
Technical Specifications | |
| Range of motion (X) | 50 μm |
| Range of motion (Y) | 50 μm |
| Range of motion (Z) | 25 μm |
| Range of motion (θX) | 1 mradian |
| Range of motion (θY) | 1 mradian |
| Resolution (X) | 0.1 nm |
| Resolution (Y) | 0.1 nm |
| Resolution (Z) | 0.05 nm |
| Resolution (θX) | 2 nradian |
| Resolution (θY) | 2 nradian |
| Resonant Frequency (X) | 1 kHz ±20% |
| Resonant Frequency (Y) | 700 Hz ±20% |
| Resonant Frequency (Z) | 700 Hz ±20% |
| Stiffness | 1.0 N/μm |
| Recommended max. load (horizontal)* | 0.2 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Al and Titanium, or Invar |
| Controller | Nano-Drive |
| * Larger load requirements 首ld be discussed with our engineering staff. | |
Additional Information | |
Nano-Man5 Drawing | Nano-Man5 Catalog Pages |
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