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当前位置:仪器网>产品中心> 北京欧兰科技发展有限公司>>MCL 三轴纳米位移台HS3M
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MCL 三轴纳米位移台HS3M

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详细介绍


Features
  • High speed

  • Low noise floor

  • Closed loop control

  • Picometer positioning resolution

  • High stability

  • Compact design



Typical Applications
  • High speed, high resolution positioning

  • Metrology

  • AFM

  • SPM




Product Description

The Nano-HS3M is a high speed, XYZ precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance.



Technical Specifications

Range of motion (XY)10 μm
Range of motion (Z)5 μm
Resolution
0.01 nm
Resonant Frequency (X)1.6 kHz
Resonant Frequency (Y)1.5 kHz
Resonant Frequency (Z)13.5 kHz
Recommended max. load (horizontal)*0.1 kg
Recommended max. load (vertical)*0.1 kg
Body MaterialAluminum or Titanium
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Position Noise Spectrum

The Nano-HS3M demonstrates less than2 picometersof position noise on all three axes. Click below to enlarge and view the data for each axis.


X-Axis


Y-Axis


Z-Axis




Additional Information

Nano-HS3M Drawing
Nano-HS3M Catalog Pages



Related Products

  • Nano-MET Series

  • Nano-MET10 & Nano-MET20

  • Nano-HS Series

  • Nano-M350

  • Nano-METZ

  • Accessories

  • Nano-Drive

  • MadPLLInstrumentation for AFM/NSOM

  • SPM-M Kit Build Your Own AFM/NSOM


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