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Features
 | Typical Applications
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Product Description |
| The Nano-UHV100 is a two axis UHV compatible nanopositioning stage constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV100 can be baked to 100°C for vacuum applications in the 10-10Torr range. The large (2.6” x 2.6”) center aperture makes the Nano-UHV100 ideal for vacuum microscopy applications. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested. Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.  |
Technical Specifications | |
| Range of motion (X) | 100 μm |
| Range of motion (Y) | 100 μm |
| Resolution (XY) | 0.2 nm |
| Resonant Frequency (X) | 500 Hz ±20% |
| Resonant Frequency (Y) | 250 Hz ±20% |
| Stiffness | 1.0 N/μm |
| θroll, θpitch(typical) | ≤1 μrad |
| θyaw(typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Invar or Titanium |
| Controller | Nano-Drive |
| * Larger load requirements 首ld be discussed with our engineering staff. | |
Additional Information | |
Nano-UHV100 Drawing | Nano-UHV100 Catalog Pages |
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