分享 收藏

MCL特高压纳米位移台UHV100

品牌：MCL Think Nano
型号： Nano-UHV100
产地：美洲美国
供应商报价：面议

北京欧兰科技发展有限公司更新时间：2022-03-04 17:31:39

销售范围售全国

入驻年限第10年

营业执照

详细介绍

Features

UHV compatible construction
Two axis (XY), large aperture
100 μm x 100 μm ranges of motion
Bakeable to 100° C
Titanium or invar construction
Closed loop control

Typical Applications

X-ray, VUV, and optical microscopy
Surface metrology
UHV atomic scale microscopy
Special designs - just contact us with your requirements

Product Description

The Nano-UHV100 is a two axis UHV compatible nanopositioning stage constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV100 can be baked to 100°C for vacuum applications in the 10^-10Torr range. The large (2.6” x 2.6”) center aperture makes the Nano-UHV100 ideal for vacuum microscopy applications. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.

Technical Specifications
Range of motion (X)	100 μm
Range of motion (Y)	100 μm
Resolution (XY)	0.2 nm
Resonant Frequency (X)	500 Hz ±20%
Resonant Frequency (Y)	250 Hz ±20%
Stiffness	1.0 N/μm
θ_roll, θ_pitch(typical)	≤1 μrad
θ_yaw(typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Invar or Titanium
Controller	Nano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.