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仪器/ 产品中心/ 光学仪器/ 光学元件/ 位移台/ MCL特高压纳米位移台UHV100
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MCL特高压纳米位移台UHV100

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详细介绍


Features
  • UHV compatible construction

  • Two axis (XY), large aperture

  • 100 μm x 100 μm ranges of motion

  • Bakeable to 100° C

  • Titanium or invar construction

  • Closed loop control



Typical Applications
  • X-ray, VUV, and optical microscopy

  • Surface metrology

  • UHV atomic scale microscopy

  • Special designs - just contact us with your requirements




Product Description

The Nano-UHV100 is a two axis UHV compatible nanopositioning stage constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV100 can be baked to 100°C for vacuum applications in the 10-10Torr range. The large (2.6” x 2.6”) center aperture makes the Nano-UHV100 ideal for vacuum microscopy applications. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.



Technical Specifications

Range of motion (X)100 μm
Range of motion (Y)100 μm
Resolution (XY)
0.2 nm
Resonant Frequency (X)500 Hz ±20%
Resonant Frequency (Y)250 Hz ±20%
Stiffness1.0 N/μm
θroll, θpitch(typical)≤1 μrad
θyaw(typical)≤3 μrad
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialInvar or Titanium
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Additional Information

Nano-UHV100 Drawing

Nano-UHV100 Catalog Pages



Related Products

  • Nano-UHV50

  • Nano-UHV200

  • MadMotor-UHV piezo motor stage

  • Accessories

  • Nano-Drive

  • Custom


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