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Features
 | Typical Applications
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Product Description |
| The Nano-UHV200 is a three axis UHV compatible nanopositioning system constructed from titanium and 316 stainless steel. Made entirely from non-magnetic UHV compatible materials, the Nano-UHV200 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 2 inch x 2 inch center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested. Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.  |
Technical Specifications | |
| Range of motion (X) | 200 μm |
| Range of motion (Y) | 200 μm |
| Range of motion (Z) | 200 μm |
| Resolution (XYZ) | 0.4 nm |
| Resonant Frequency (X) | 300 Hz ±20% |
| Resonant Frequency (Y) | 150 Hz ±20% |
| Resonant Frequency (Z) | 175 Hz ±20% |
| Stiffness | 2 N/μm |
| θroll, θpitch(typical) | ≤1 μrad |
| θyaw(typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Titanium and 316 SS |
| Controller | Nano-Drive |
| * Larger load requirements 首ld be discussed with our engineering staff. | |
Additional Information | |
Nano-UHV200 Drawing | Nano-UHV200 Catalog Pages |
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