详细介绍
产品介绍：
The X-Prep® fixture adapter is also secured to the motorized stage on the X-Prep® Vision™, ensuring the measurement/tool control coordinates remain aligned when transferred between systems.
A library with over 130 materials (i.e., GaAs, InGaAs, SiC, Sapphire/Al2O3, InP, SiGe, GaN, photo-resist) is included with every system.
Meaurement & Observation - How it Works
IR light is focused onto a sample, and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.
Meauring Below 10 µm Thickness
For applications requiring thinning to less than 10 µm, precise measurement is possible only by adding the visible light spectrometer accessory.
FEATURES
| Multipoint scan or single-point thickness measurement | 10 microns to full thickness (1 mm) range of measurement (15 nm to 1 mm thick when configured with #15-51000 Spectrometer) |
| Motorized, automatic X/Y/Z (auto-focus) with <1s acquisition time | Automatic edge and corner detection aligns measurement grid with X-Prep® - including theta correction |
| Edge exclusion with X/Y input | Stage fitted with X-Prep® fixture adapter |
| "Drive to Coordinate" software navigation | Viewing of either 2D plot/map or 3D graph |
| Supplied with Allied proprietary X-Correct™ software | CCD camera (#15-50020) must be purchased separately if not purchasing Visible Light Spectrometer (#15-51000) |
| Roughness - 15 micron finish | 100 mm x 100 mm stage travel |
| Software automation extendable through .NET | Data export using standard Windows methods |
| One (1) year warranty | Dimensions: 14" W x 17" D x 19" H (355 x 431 x 483 mm) |
产品优势
The X-Prep® Vision™ is a metrology tool that enables measurement of silicon and semitransparent substrates. It is necessary for applications that require uniform thinning to a specific target with a tolerance of +/- 3 µm or better.
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- （日本）日本奥林巴斯
- （美国）美国OGP
- （德国）捷镭
- （美国）美国Akrometrix
- （朝阳区）微厘光电
- （德国）Microtronic
- （西青区）奥特梅尔
- （新加坡）AXIS-TEC
- （以色列）SELA
- （英国）牛津仪器
- （新加坡）Semicaps
- （美国）赛默飞世尔
- （荷兰）JIACO
- （日本）日本滨松
- （日本）SAMCO
- （苏州）蓝岸
- （日本）尼康
- （美国）若克兰
- （英国）微视
- （美国）SONIX
- （美国）美国Allied
- （美国）ASP
- （美国）Nisene
- （日本）日立
- （英国）英国ABERLINK
- （德国）德国werth
- （美国）美国福禄克
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仪企号
似空科学仪器（上海）有限公司
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