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Allied基材厚度测量仪 X-PREP® VISION™
- 品牌：美国Allied
- 型号： X-PREP® VISION™
- 产地：美洲 美国
- 供应商报价：面议
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似空科学仪器（上海）有限公司
更新时间：2025-04-25 20:23:31 -
销售范围售全国
入驻年限第8年
营业执照已审核
- 同类产品研磨抛光机(14件)
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产品特点
- The X-Prep® Vision™ is a metrology tool that enables measurement of silicon and semitransparent substrates. It is necessary for applications that require uniform thinning to a specific target with a tolerance of +/- 3 µm or better.
详细介绍
产品介绍：
The X-Prep® fixture adapter is also secured to the motorized stage on the X-Prep® Vision™, ensuring the measurement/tool control coordinates remain aligned when transferred between systems.
A library with over 130 materials (i.e., GaAs, InGaAs, SiC, Sapphire/Al2O3, InP, SiGe, GaN, photo-resist) is included with every system.
Meaurement & Observation - How it Works
IR light is focused onto a sample, and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.
Meauring Below 10 µm Thickness
For applications requiring thinning to less than 10 µm, precise measurement is possible only by adding the visible light spectrometer accessory.
FEATURESMultipoint scan or single-point thickness measurement 10 microns to full thickness (1 mm) range of measurement (15 nm to 1 mm thick when configured with #15-51000 Spectrometer) Motorized, automatic X/Y/Z (auto-focus) with <1s acquisition time Automatic edge and corner detection aligns measurement grid with X-Prep® - including theta correction Edge exclusion with X/Y input Stage fitted with X-Prep® fixture adapter "Drive to Coordinate" software navigation Viewing of either 2D plot/map or 3D graph Supplied with Allied proprietary X-Correct™ software CCD camera (#15-50020) must be purchased separately if not purchasing Visible Light Spectrometer (#15-51000) Roughness - 15 micron finish 100 mm x 100 mm stage travel Software automation extendable through .NET Data export using standard Windows methods One (1) year warranty Dimensions: 14" W x 17" D x 19" H (355 x 431 x 483 mm)
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