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MCL 提示/倾斜、旋转纳米位移台Align3 系列
- 品牌：MCL Think Nano
- 型号： Nano-Align3 Series
- 产地：美洲 美国
- 供应商报价：面议
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北京欧兰科技发展有限公司
更新时间：2022-03-04 17:31:39 -
销售范围售全国
入驻年限第10年
营业执照
- 同类产品微定位位移台(82件)
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详细介绍
Features Low profile: 0.8"
Three axis motion (Z θX θY)
Large center aperture: 2.6" x 2.6"
Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θXθY)
Closed loop control
Typical Applications Z-axis plus tip/tilt alignment
Nanolithography
Microscopy
MEMS
Product DescriptionThe Nano-Align3 is a three axis (Z, θX , θY) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ® technology provide picometer and nanoradian precision under closed loop control.
Technical Specifications
Ranges of motion (Nano-Align3-100) Z axis 100 μm θX and θY 2 mradian Ranges of motion (Nano-Align3-200) Z axis 200 μm θX and θY 4 mradian Resolution (Nano-Align3-100) 0.2nm/ 4 nradian Resolution (Nano-Align3-200) 0.4nm/ 8 nradian Resonant Frequency (Nano-Align3-100) 600 Hz ±20% Resonant Frequency (Nano-Align3-200) 450 Hz ±20% Stiffness 1.0 N/μm Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Aluminum, Titanium, or Invar Controller Nano-Drive®/Nano-Drive®85 * Larger load requirements should be discussed with our engineering staff. Additional Information
Nano-Align3 Series Drawing 
Nano-Align3 Series Catalog Pages 
Related ProductsNano-Align5 Series
Nano-Align6 Series
Nano-Man5
Nano-M3Z
Nano-ZS Series
Accessories
Nano-Drive®
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