  |
Features
 | Typical Applications
|
Product Description
The Nano-Align3 is a three axis (Z, θX , θY) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ® technology provide picometer and nanoradian precision under closed loop control.
Technical Specifications | |
| Ranges of motion (Nano-Align3-100) | |
| Z axis | 100 μm |
| θX and θY | 2 mradian |
| Ranges of motion (Nano-Align3-200) | |
| Z axis | 200 μm |
| θX and θY | 4 mradian |
| Resolution (Nano-Align3-100) | 0.2nm/ 4 nradian |
| Resolution (Nano-Align3-200) | 0.4nm/ 8 nradian |
| Resonant Frequency (Nano-Align3-100) | 600 Hz ±20% |
| Resonant Frequency (Nano-Align3-200) | 450 Hz ±20% |
| Stiffness | 1.0 N/μm |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum, Titanium, or Invar |
| Controller | Nano-Drive®/Nano-Drive®85 |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-Align3 Series Drawing | Nano-Align3 Series Catalog Pages |
Related Products
Nano-Align5 Series
Nano-Align6 Series
Nano-Man5
Nano-M3Z
Nano-ZS Series
Accessories
Nano-Drive®
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