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MCL 提示/倾斜、旋转纳米位移台Align6系列

品牌：MCL Think Nano
型号： Nano-Align6 Series
产地：美洲美国
供应商报价：面议

北京欧兰科技发展有限公司更新时间：2022-03-04 17:31:39

销售范围售全国

入驻年限第10年

营业执照

详细介绍

Features

Low profile
Six axis motion (XYZ θ_Xθ_Yθ_Z)
100 μm x 100 μm x 100 μm x 1.1 mrad x 1.5 mrad x 5 mrad ranges of motion
200 μm x 200 μm x 200 μm x 2.3 mrad x 3.0 mrad x 5 mrad ranges of motion
Center aperture: 35mm diameter
Closed loop control

Typical Applications

Alignment
MEMS
Nanolithography
Metrology

six axis piezo stage with xyz tip tilt and in-plane rotation and manual micrometer stage

Product Description

The Nano-Align6 is a six axis (X, Y, Z, θ_X, θ_Y, θ_Z) nanopositioning system with a large center aperture. The Nano-Align6 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis. The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQtechnology for absolute position measurement and picometer/nanoradian accuracy under closed loop control.

Technical Specifications
Ranges of motion (Nano-Align6-100)	100 x 100 x 100 μm x 1.1 mrad (θ_X) x 1.5 mrad (θ_Y) x 5 mrad (θ_Z)
Ranges of motion (Nano-Align6-200)	200 x 200 x 200 μm x 2.3 mrad (θ_X) x 3.0 mrad (θ_Y) x 5 mrad (θ_Z)
Resolution (Nano-Align6-100)	0.2 nm (XYZ), 2.2 nrad (θ_X), 3.0 nrad (θ_Y), 10 nrad (θ_Z)
Resolution (Nano-Align6-200)	0.4 nm (XYZ), 4.6 nrad (θ_X), 6.0 nrad (θ_Y), 10 nrad (θ_Z)
Resonant Frequencies
X axis (Nano-Align6-100/Nano-Align6-200)	450/400 Hz ±20%
Y axis (Nano-Align6-100/Nano-Align6-200)	350/300 Hz ±20%
Z axis (Nano-Align6-100/Nano-Align6-200)	450/350 Hz ±20%
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Aluminum, Titanium or Invar
Controller	Nano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.