光谱型椭偏仪

Different tools:

• SE-2xxx-全自动测试平台
• SE-1100-适于测试柔性村底材料
• IRSE-红外光谱型椭偏仪
• EP-椭偏测孔隙率
• SE-1000-低成本手动测试平台
• LE-103PV-激光型椭偏仪

Application:

Photonics:

• LED, AIGaN, GaN, InP, GaAs
• Reflective Coatings, ARC, ll-V devices(EEL, VCSEL, ECL)
• MEMS
• Sol-Gel.

Photovaltage

• Thin films and silicon solar cell, Nanostructure Cells
• Transparent conductive oxide, Nano dots, Nanowires, CNT

Organics:

• OLED.OPV.Sensors. OTFT

Semiconductors:

• High-k, Gate Oxide , Nitride oxide , Low-k
• Interconnects . Lithography thin films
• Epi-layers :SOl,SiGe ,Strained Si. SiC, Poly

Flat Panel Displays:

• TFT-LCD.LTPS.IGZO,OLED, electrochromic layers

General：

• Ferroelectric materials(BST.SBT.PZT
• Fuel Cells .SOFC ,Porous electrode
• Graphene
• 3D materials , periodic structures