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Features
 | Typical Applications
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Product Description |
The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ?technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS. |
Technical Specifications | |
| Range of motion (X) | 200 μm |
| Resolution | 0.4 nm |
| Resonant Frequency | 500 Hz ±20% |
| Resonant Frequency (100g load) | 200 Hz ±20% |
| Stiffness | 0.2 N/μm |
| θroll, θpitch(typical) | ≤0.3 μrad |
| θyaw(typical) | ≤0.3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Al |
| Controller | Nano-Drive? |
| * Larger load requirements 首ld be discussed with our engineering staff. | |
Additional Information | |
Nano-LR200 Drawing | Nano-LR200 Catalog Pages |
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