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MCL 纳米线性位移台LR200

品牌：MCL Think Nano
型号： NanoLR200
产地：美洲美国
供应商报价：面议

北京欧兰科技发展有限公司更新时间：2022-03-04 17:31:39

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入驻年限第10年

营业执照

详细介绍

Features

Long range single axis motion: 200 μm
Less than 5 nm out of plane motion
Low profile design
Closed loop control

Typical Applications

Surface metrology
Wafer scanning and alignment
Optical alignment

Product Description

The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ^?technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.

Technical Specifications
Range of motion (X)	200 μm
Resolution	0.4 nm
Resonant Frequency	500 Hz ±20%
Resonant Frequency (100g load)	200 Hz ±20%
Stiffness	0.2 N/μm
θ_roll, θ_pitch(typical)	≤0.3 μrad
θ_yaw(typical)	≤0.3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al
Controller	Nano-Drive^?
* Larger load requirements 首ld be discussed with our engineering staff.