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仪器/ 产品中心/ 光学仪器/ 光学元件/ 位移台/ MCL纳米双轴位移台M250
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MCL纳米双轴位移台M250

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详细介绍


Features
  • Compact size

  • Two axis motion

  • 50 μm x 50 μm ranges of motion

  • 0.5 inch aperture

  • Closed loop control



Typical Applications
  • Alignment

  • Nanolithography

  • Scanning microscopy




Product Description

The Nano-M250 is a compact, two axis nanopositioning system constructed from titanium or invar. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The 0.5” center aperture provides a convienent optical pathway or feedthrough for probe assemblies. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models.



Technical Specifications

Range of motion (XY)50 μm x 50 μm
Resolution
0.1 nm
Resonant Frequency (X)1.0 kHz ±20%
Resonant Frequency (Y)700 Hz ±20%
Stiffness1.0 N/μm
θroll, θpitch(typical)≤1 μrad
θyaw(typical)≤3 μrad
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialInvar or Titanium
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Additional Information

Nano-M250 Drawing

Nano-M250 Catalog Pages



Related Products

  • Nano-SPM200

  • Nano-M350

  • Nano-Man5

  • Nano-M3Z

  • Nano-MZ

  • Accessories

  • Nano-Drive


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