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MCL纳米双轴位移台M250
- 品牌:美国MCL Think Nano
- 型号: Nano-M250
- 产地:美国
- 供应商报价: 面议
- 北京欧兰科技发展有限公司 更新时间:2022-03-04 17:31:39
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企业性质
入驻年限第4年
营业执照
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- 详细介绍
Features Compact size
Two axis motion
50 μm x 50 μm ranges of motion
0.5 inch aperture
Closed loop control
Typical Applications Alignment
Nanolithography
Scanning microscopy
Product Description
The Nano-M250 is a compact, two axis nanopositioning system constructed from titanium or invar. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The 0.5” center aperture provides a convienent optical pathway or feedthrough for probe assemblies. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models. Technical Specifications
Range of motion (XY) 50 μm x 50 μm Resolution 0.1 nm Resonant Frequency (X) 1.0 kHz ±20% Resonant Frequency (Y) 700 Hz ±20% Stiffness 1.0 N/μm θroll, θpitch(typical) ≤1 μrad θyaw(typical) ≤3 μrad Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Invar or Titanium Controller Nano-Drive * Larger load requirements 首ld be discussed with our engineering staff. Additional Information
Nano-M250 Drawing Nano-M250 Catalog Pages Related Products
Nano-SPM200
Nano-M350
Nano-Man5
Nano-M3Z
Nano-MZ
Accessories
Nano-Drive