Elaboration of 1m square arrays of octadecyltrimeth

Local chemical grafting of OctadecylTriMethoxySilane (OTMS) on SiO2/Si substrates has been successfully performed on specific micrometric areas by combining nano-imprint lithography and Chemical Vapour Deposition (CVD). The optimisation of the CVD experimental conditions using atomic force microscopy has lead to homogeneous 1 m square arrays of OTMS monolayers on millimetric areas.