氮化硅薄膜窗口实现原子分辨

Silicon nitride membranes can be used for windows of environmental chambers for in situ electron microscopy.WereportthataberrationcorrectedscanningtransmissionelectronmicroscopySTEM achieved atomic resolution on gold nanoparticles placed on both sides of a 50-nm-thick silicon nitride membrane at 200 keV electron beam energy. Spatial frequencies of 1/1.2 A were visible for a beam semi-angle of 26.5 mrad. Imaging though a 100-nm-thick membrane was also tested. The achieved imaging contrast was evaluated using Monte Carlo simulations of the STEM imaging of a sample of with a representative geometry and composition. 氮化硅薄膜窗口 透射电镜（TEM）用氮化硅薄膜窗口