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Features
 | Typical Applications
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Product Description |
The Nano-MET2 and Nano-MET3 are ultra-low noise, high precision nanopositioning systems with picometer positioning resolution. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement under closed loop control. The ultra-low position noise (4 picometers/Hz in XY and 400 femtometers/√Hz in Z) of these nanopositioning systems make them ideal for demanding metrology applications. With a resonant frequency of 13.5kHz, the z-axis of the Nano-MET3 offers ultra-fast response needed for demanding AFM applications. Related products include theNano-METZ,Nano-MET10 and Nano-MET20nanopositioning systems. |
Technical Specifications | |
| Range of motion (XY) | 75 μm |
| Range of motion (Z) | 5 μm |
| Resolution (XY) | 0.15 nm |
| Resolution (Z) | 0.005 nm |
| Resonant Frequency (XY, Nano-MET2) | 1.4 kHz |
| Resonant Frequency (XY, Nano-MET3)) | 1.0 kHz |
| Resonant Frequency (Z, Nano-MET3) | 13.5 kHz |
| Recommended max. load (horizontal)* | 100 g |
| Recommended max. load (vertical)* | 100g |
| Body Material | Aluminum |
| Controller | Nano-Drive |
| * Larger load requirements 首ld be discussed with our engineering staff. | |
Position Noise Spectrum | ||
| The Nano-MET Series demonstrates less than4 picometersof position noise on X and Y and less than400 femtometersof position noise on Z. Click below to enlarge and view the data for each axis. | ||
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Additional Information | |
Nano-MET2 Drawing (2 Axis) Nano-MET3 Drawing (3 Axis)  | Nano-MET Series Catalog Pages |
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