用户论文：Structure and microtribological behavior of Teflon and Teflon/Si3N4 micro-assemb领 film

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Micro-assemb领 TeØon/Si3N4 multilayer Ælm was developed by ion beam alternating sputtering TeØon and Si3N4 ceramic targets. The structural, mechanical and microtribological properties were studied by PHI-5300, FTIR, XRD and atomic force and friction force microscope (AFM/FFM). The results show that the multilayer consists of Si3N4 component and crystalline TeØon. The hardness of the multilayer is less than that of Si3N4; but the toughness of TeØon/Si3N4 is greatly improved. The friction coefÆcient of TeØon/Si3N4 multilayer is lower than that of Si3N4 Ælm, and the wear resistance of TeØon/Si3N4 multilayer is much greater than that of TeØon Ælm. The friction force of TeØon/Si3N4 Ælm is linear with the load in nanoscale. The worn track will be formed in TeØon and TeØon/Si3N4 Ælm when the load is greater than 70nN. 全文请访问： 扫描探针显微镜(SPM/AFM/STM)