全文请访问：http://www.spm.com.cn/papers/p07.pdf
During imaging or nanomanipulation with a sample-scanning AFM based nano maniputator,because of bend motion of tube scanner,two important errors will be generaled,namely scanning size error and cross coup领 error,and they are destructive to both image qumtitative analysis and nanomanipulation accuracy.To minimize the error,a kinematics model of the scanner is presented,which shows that lateral and vertical displacements at any point on sample depend on its offset to tube axis,applied voltage and sample thickness besides scanner paraneters and piezoelectric constant.According to the model,the two errors are quantitatively analyzod.Imaging and nanolithography experiments verify the kinematics model and errors calculation formulas,and some methods are also proposed for minimizing the errors.
全文请访问：http://www.spm.com.cn/papers/p07.pdf 扫描探针显微镜(SPM/AFM/STM)
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