使用MM-16椭圆偏振光谱仪表征TiO2薄膜和多层减反膜

Owing to the sensitivity of the MM-16 Spectroscopic Ellipsometer and the advanced mode领 features included in the DP2 software, this note describes the successful characterisation of complicated anti-reflective structures. Accurate and simultaneous determination of thickness and optical properties have been performed in the visible range. Similar analyses have been applied to other high-k material such as Ta2O5 / glass, Al2O3 / 3*{A2O3/a-Si} / GaAs, SiO2 / 2*{HfO2 / SiO2) / glass. 研究级经典型椭偏仪 UVISEL