使用相位调制型椭圆偏振光谱仪表征III-V族半导体

The high accuracy characterisation of the thicknesses and optical properties of III-V semiconductors has been successfully performed using the UVISEL Spectroscopic Phase Modulated Ellipsometer. Moreover, Spectroscopic Ellipsometry can be applied to characterise multilayers of miscellaneous binary, ternary semiconductors and alloys (MQW structure, PIN structure, pump laser, laser semiconductor,). 研究级经典型椭偏仪 UVISEL