椭圆偏振光谱仪的标准应用

Ellipsometry is a very versatile optical technique that has applications in many different fields, from the micro electronics and semiconductor industries (for characterizing oxides or photoresists on silicon wafers, for ex ample) to biology. This very sensitive measurement technique provides unequalled capabilities for thin film metrology, and has the advantage that it is non-destructive as it uses polarized light to probe the dielectr properties of a sample. 研究级经典型椭偏仪 UVISEL 研究级全自动椭偏仪UVISEL 2 一键式全自动快速椭偏仪 Auto SE 智能型多功能椭偏仪Smart SE 在线椭偏仪 In-situ series