使用椭圆偏振光谱仪测量玻璃和预蒸镀基底上Y2O3的折射.p

The deposition conditions have generated inhomogeneous porous layers that have been observed by the UVISEL Spectroscopic Phase Modulated Ellipsometer. Moreover, the spectroscopic measurements allow determination of the small discrepancies between the optical constants of a Y2O3 film grown at bare substrate and the one grown on a ZrO2 film. 研究级经典型椭偏仪 UVISEL