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德国SUSS匀胶机/热板/显影机
- 品牌:德国suss
- 型号: LabSpin6/LabSpin8
- 产地:德国
- 供应商报价: 面议
- 香港壘為信息科技實業有限公司 更新时间:2020-10-26 11:04:52
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企业性质一般经销商
入驻年限第5年
营业执照已审核
- 同类产品半导体参数分析仪(16件)
联系方式:张先生
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- 详细介绍
Substrates
LabSpin 6: up to 150mm round or 100mm square substrates LabSpin 8: up to 200mm round or 150mm square substrates
Motor
Brushless E-motor with collection glass beaker Spin speed: min 50 rpm
max 8000 rpm (with 200mm chuck)
Acceleration: max 3000 rpm/s
Controller
Graphical User Interface: Touch panel with color display Number programmable recipes: max 200
Step number per recipe: max 40
Loop function: repeats a set of process stepCoater Options
Cover plate for additional functions
Resist dispense systems
Pressurized syringe dispense
Full automatic dispense system
Edge Bead Removal (EBR)
Developer Options
Cover plate for additional functions Developer dispense option
DI-water dispense option
Nitrogen Drying option